CUSTOMIZED
Substrate material: UVFS (C7980 0F KrF grade)
Diameter: 25.4 mm +0/-0.1 mm
Thickness: 3.0 mm +/-0.1 mm
Clear aperture: >90%
Surface quality, S1/S2: 10-5 S-D
Surface flatness, S1/S2: <λ/10 @ 633 nm
Parallelism: <3 arcmin
Protective chamfers: 0.2-0.4 mm x 45 deg
Chips: <0.2 mm stoned
Coatings (IBS):
S1: R<0.25% @ 266 nm, AOI= 0°
S2: R<0.25% @ 266 nm, AOI= 0°
